Modular MEMS Pressure Sensors: Structure and Manufacturing
Modular pressure sensors for reliable sealing and flexible equipment integration
An equipment platform may need several pressure ranges, process connections and outputs, while still requiring reliable media isolation and sealing. Rodee’s modular MEMS piezoresistive sensor design separates pressure input, sensing, signal processing and output into four modules. Welded seals and assembly during manufacturing support both measurement reliability and configuration choices.
Isolate the medium and address leakage at the joints
Where the measured medium must remain separate from the sensing chip, the package needs to transfer pressure while providing isolation. A metal diaphragm and oil-filled chamber transmit pressure to the MEMS chip without direct contact between the chip and the medium.
Welded joints connect the diaphragm, retaining ring and metal support, and join the sensing module to the pressure-input module. This reduces reliance on sealing rings at these joints and the leakage risk associated with their ageing. A circular locating groove assists diaphragm and ring positioning for consistent assembly and welding; a flared opening is used to improve pressure-transfer signal linearity.
Configure ranges, connections and outputs during manufacturing
The four modules can be designed and manufactured separately, then assembled for the required range, process connection, electrical interface and output. An equipment platform requiring several specifications can be assessed against shared mounting space, harness and controller requirements instead of restricting every application to one finished configuration.
Module combinations are completed during manufacturing. The delivered sensor is used in its specified configuration, without the installer having to exchange sensing modules or electrical interfaces. Compact packaging also offers an option for equipment with limited installation space.
Choose the integration stage, from pressure core to complete transmitter
Rodee applies the related sensing-package construction and modular design to the following core and transmitter series:
Oil-filled pressure cores: RS PC070-P, RS PC500-P, RS PC160, RS PC350 and RS PC400. Pressure-calibrated, temperature-compensated cores: RS PMSC350.
Analogue-output transmitters: RS PM050-Pro, RS PM160-E, RS PM400-E, RS PM160 and RS PM400. Digital-output transmitters: RS PM160-DV and RS PM160-DVL.
An uncompensated core can suit integration where signal conditioning and calibration will be completed in-house. A compensated core provides the corresponding compensated output, while a complete transmitter adds the specified process connection and signal-output configuration. Confirm accuracy, compensated temperature range and environmental performance in the relevant model documentation.
Provide the operating conditions and installation requirements together
For hydraulic, pneumatic, data-centre liquid-cooling, water-treatment, HVAC or rail projects, provide the medium, pressure range, temperatures, mounting dimensions and required output. Include interface drawings when retaining a harness or mounting arrangement, and state any vibration, shock or EMC acceptance requirements so a suitable configuration can be assessed.
Patent documents
Read the patent description and claims · View the published PDF · Download PDF
Patent record and certificate
| Title on the certificate | 一种模块化设计MEMS扩散硅压力传感器 |
|---|---|
| Patent type | Utility model |
| Patent number | ZL 2020 2 1471525.0 |
| Filing date | 2020-07-23 |
| Grant publication date | 2021-02-05 |
| Grant publication number | CN 212482747 U |
| Certificate number | 12462831 |
| Inventor named on the certificate | 唐中山 (Tang Zhongshan) |
| Patentee named on the certificate | 唐中山 (Tang Zhongshan) |
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Related products and technical support
Review the product documents below by pressure range, compensation and output, or share operating conditions and mounting drawings to discuss a suitable configuration.
- Uncompensated Low-Pressure Core (RS PC070-P)
- Uncompensated Medium-Pressure Core (RS PC160)
- Uncompensated High-Pressure Core (RS PC350)
- Calibrated and Temperature-Compensated Pressure Sensor Core
- Pressure Transmitter (Analog Output)
- Pressure Transmitter (Digital Output)
Contact Rodee Sensors for selection and technical documents · Back to the patent portfolio